Thomas Schuelke – Publications

2018

Isatin Detection Using a Boron-Doped Diamond 3-in-1 Sensing Platform

Ensch, M., Maldonado, V. Y., Swain, G. M., Rechenberg, R., Becker, M. F., Schuelke, T. & Rusinek, C. A. Feb 6 2018 In : Analytical Chemistry. 90, 3, p. 1951-1958 8 p.

Research output: Contribution to journal › Article

Isatin

Diamond

Boron

Electrodes

Microelectrodes

2017

Extending microwave plasma assisted CVD SCD growth to pressures of 400 Torr

Muehle, M., Asmussen, J., Becker, M. F. & Schuelke, T. Oct 1 2017 In : Diamond and Related Materials. 79, p. 150-163 14 p.

Research output: Contribution to journal › Article

Diamond

Chemical vapor deposition

Diamonds

diamonds

reactors

Quantification of diffuse scattering in glass and polymers by parametric power law analysis of UV to NIR light

Tsu, D. V., Muehle, M., Becker, M., Schuelke, T. & Slagter, J. 2017 (Accepted/In press) In : Surface and Coatings Technology.

Research output: Contribution to journal › Article

Polymers

haze

Scattering

Glass

glass

RF characterization of coplanar waveguide (CPW) transmission lines on single-crystalline diamond platform for integrated high power RF electronic systems

He, Y., Becker, M., Grotjohn, T., Hardy, A., Muehle, M., Schuelke, T. & Papapolymerou, J. Oct 4 2017 2017 IEEE MTT-S International Microwave Symposium, IMS 2017. Institute of Electrical and Electronics Engineers Inc., p. 517-520 4 p. 8058613

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Coplanar waveguides

transmission lines

Electric lines

Diamonds

platforms

2016

2 Citations

Fabrication and characterization of boron doped diamond microelectrode arrays of varied geometry

Rusinek, C. A., Becker, M. F., Rechenberg, R. & Schuelke, T. Dec 1 2016 In : Electrochemistry Communications. 73, p. 10-14 5 p.

Research output: Contribution to journal › Article

Diamond

Boron

Microelectrodes

Diamonds

Fabrication

2015

4 Citations

Fabrication and characterization of a corner architecture Schottky barrier diode structure

Nicley, S., Zajac, S., Rechenberg, R., Becker, M., Hardy, A., Schuelke, T. & Grotjohn, T. A. 2015 (Accepted/In press) In : Physica Status Solidi (A) Applications and Materials Science.

Research output: Contribution to journal › Article

Schottky barrier diodes

Schottky diodes

Diodes

diodes

Fabrication

2014

11 Citations

Heavy phosphorus doping by epitaxial growth on the (111) diamond surface

Grotjohn, T. A., Tran, D. T., Yaran, M. K., Demlow, S. N. & Schuelke, T. Apr 2014 In : Diamond and Related Materials. 44, p. 129-133 5 p.

Research output: Contribution to journal › Article

Diamond

Epitaxial growth

Phosphorus

phosphorus

Diamonds

Progress on preferential etching and phosphorus doping of single crystal diamond

Grotjohn, T. A., Tran, D. T., Yaran, M. K. & Schuelke, T. 2014 Materials Research Society Symposium Proceedings. January ed. Materials Research Society, Vol. 1634, p. 7-18 12 p.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Diamond

Phosphorus

phosphorus

Etching

Diamonds

7 Citations

Substrate crystal recovery for homoepitaxial diamond synthesis

Muehle, M., Becker, M. F., Schuelke, T. & Asmussen, J. 2014 In : Diamond and Related Materials. 42, p. 8-14 7 p.

Research output: Contribution to journal › Article

Diamond

Diamonds

recovery

diamonds

Recovery

2013

37 Citations

Diamond polishing

Schuelke, T. & Grotjohn, T. A. 2013 In : Diamond and Related Materials. 32, p. 17-26 10 p.

Research output: Contribution to journal › Article

Diamond

Polishing

polishing

Diamonds

diamonds

34 Citations

Experimentally defining the safe and efficient, high pressure microwave plasma assisted CVD operating regime for single crystal diamond synthesis

Lu, J., Gu, Y., Grotjohn, T. A., Schuelke, T. & Asmussen, J. 2013 In : Diamond and Related Materials. 37, p. 17-28 12 p.

Research output: Contribution to journal › Article

Diamond

Chemical vapor deposition

Diamonds

diamonds

Microwaves

8 Citations

Highly sensitive detection of urinary cadmium to assess personal exposure

Argun, A. A., Banks, A. M., Merlen, G., Tempelman, L. A., Becker, M. F., Schuelke, T. & Dweik, B. M. Apr 22 2013 In : Analytica Chimica Acta. 773, p. 45-51 7 p.

Research output: Contribution to journal › Article

Cadmium

cadmium

sensor

Electrochemical sensors

Diamond

2012

1 Citations

Advances in Plasma Synthesis of UNCD Films

Asmussen, J., Grotjohn, T. A. & Schuelke, T. Sep 2012 Ultrananocrystalline Diamond: Synthesis, Properties and Applications: Second Edition. Elsevier Inc., p. 53-83 31 p.

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Speech synthesis

Plasmas

27 Citations

Microwave plasma reactor design for high pressure and high power density diamond synthesis

Gu, Y., Lu, J., Grotjohn, T., Schuelke, T. & Asmussen, J. Apr 2012 In : Diamond and Related Materials. 24, p. 210-214 5 p.

Research output: Contribution to journal › Article

reactor design

Diamond

radiant flux density

Diamonds

diamonds

1 Citations

SiO 2 antireflection layers for single-crystal diamond

Reinhard, D. K., Tran, D. T., Schuelke, T., Becker, M. F., Grotjohn, T. A. & Asmussen, J. May 2012 In : Diamond and Related Materials. 25, p. 84-86 3 p.

Research output: Contribution to journal › Article

Diamond

Antireflection coatings

antireflection coatings

Diamonds

diamonds

2010

22 Citations

Biocompatibility and mechanical properties of diamond-like coatings on cobalt-chromium-molybdenum steel and titanium-aluminum-vanadium biomedical alloys

Hinüber, C., Kleemann, C., Friederichs, R. J., Haubold, L., Scheibe, H. J., Schuelke, T., Boehlert, C. & Baumann, M. J. Nov 2010 In : Journal of Biomedical Materials Research - Part A. 95 A, 2, p. 388-400 13 p.

Research output: Contribution to journal › Article

Vanadium

Diamond

Molybdenum

Steel

Chromium

4 Citations

The influence of the surface texture of hydrogen-free tetrahedral amorphous carbon films on their wear performance

Haubold, L., Schuelke, T., Becker, M. & Woodrough, G. Feb 2010 In : Diamond and Related Materials. 19, 2-3, p. 225-228 4 p.

Research output: Contribution to journal › Article

Carbon films

Amorphous carbon

Amorphous films

Hydrogen

textures

2009

10 Citations

Deposition of thick boron-doped homoepitaxial single crystal diamond by microwave plasma chemical vapor deposition

Ramamurti, R., Becker, M., Schuelke, T., Grotjohn, T. A., Reinhard, D. K. & Asmussen, J. May 2009 In : Diamond and Related Materials. 18, 5-8, p. 704-706 3 p.

Research output: Contribution to journal › Article

Diamond

Boron

doped crystals

Chemical vapor deposition

Diamonds

2008

22 Citations

Boron doped diamond deposited by microwave plasma-assisted CVD at low and high pressures

Ramamurti, R., Becker, M., Schuelke, T., Grotjohn, T., Reinhard, D., Swain, G. & Asmussen, J. Apr 2008 In : Diamond and Related Materials. 17, 4-5, p. 481-485 5 p.

Research output: Contribution to journal › Article

diborane

Diamond

Boron

Chemical vapor deposition

Diamonds

26 Citations

Multiple substrate microwave plasma-assisted chemical vapor deposition single crystal diamond synthesis

Asmussen, J., Grotjohn, T. A., Schuelke, T., Becker, M. F., Yaran, M. K., King, D. J., Wicklein, S. & Reinhard, D. K. 2008 In : Applied Physics Letters. 93, 3, 031502

Research output: Contribution to journal › Article

diamonds

vapor deposition

microwaves

single crystals

synthesis

22 Citations

Scaling the microwave plasma-assisted chemical vapor diamond deposition process to 150-200 mm substrates

King, D., Yaran, M. K., Schuelke, T., Grotjohn, T. A., Reinhard, D. K. & Asmussen, J. Apr 2008 In : Diamond and Related Materials. 17, 4-5, p. 520-524 5 p.

Research output: Contribution to journal › Article

Diamond

Diamonds

diamonds

Vapors

Microwaves

16 Citations

Synthesis of boron-doped homoepitaxial single crystal diamond by microwave plasma chemical vapor deposition

Ramamurti, R., Becker, M., Schuelke, T., Grotjohn, T., Reinhard, D. & Asmussen, J. Jul 2008 In : Diamond and Related Materials. 17, 7-10, p. 1320-1323 4 p.

Research output: Contribution to journal › Article

Diamond

Boron

doped crystals

Chemical vapor deposition

Diamonds

2007

Guest Editorial: Special issue on plenary and invited papers from ICOPS 2006

Almussen, J., Grotjohn, T. A. & Schuelke, T. Apr 2007 In : IEEE Transactions on Plasma Science. 35, 2 I, p. 125-126 2 p.

Research output: Contribution to journal › Article

2006

26 Citations

Extending the 3ω-method to the MHz range for thermal conductivity measurements of diamond thin films

Ahmed, S., Liske, R., Wunderer, T., Leonhardt, M., Ziervogel, R., Fansler, C., Grotjohn, T., Asmussen, J. & Schuelke, T. Feb 2006 In : Diamond and Related Materials. 15, 2-3, p. 389-393 5 p.

Research output: Contribution to journal › Article

Diamond films

Thermal conductivity

thermal conductivity

diamonds

Thin films

2004

18 Citations

Fabrication and properties of ultranano, nano, and microcrystalline diamond membranes and sheets

Reinhard, D. K., Grotjohn, T. A., Becker, M., Yaran, M. K., Schuelke, T. & Asmussen, J. Nov 2004 In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22, 6, p. 2811-2817 7 p.

Research output: Contribution to journal › Article

Diamonds

diamonds

membranes

Membranes

Fabrication

The vacuum arc plasma source and its applications

Schuelke, T., Becker, M., Grotjohn, T. A. & Asmussen, J. 2004 IEEE International Conference on Plasma Science. p. 309 1 p. 5A1

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

plasma jets

arcs

vacuum

electrodes

surface treatment

2002

7 Citations

Nondestructive testing of damage layers in semiconductor materials by surface acoustic waves

Schneider, D., Stiehl, E., Hammer, R., Franke, A., Riegert, R. & Schuelke, T. 2002 Proceedings of SPIE - The International Society for Optical Engineering. Straikov, A. & Tobin, Jr., K. W. (eds.). Vol. 4692, p. 195-211 17 p.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nondestructive examination

Surface waves

Acoustic waves

Semiconductor materials

damage

42 Citations

Quality control of ultra-thin and super-hard coatings by laser-acoustics

Schneider, D., Siemroth, P., Schülke, T., Berthold, J., Schultrich, B., Schneider, H. H., Ohr, R., Petereit, B. & Hillgers, H. Apr 15 2002 In : Surface and Coatings Technology. 153, 2-3, p. 252-260 9 p.

Research output: Contribution to journal › Article

Hard coatings

quality control

Quality control

Acoustics

coatings

2000

34 Citations

Comparison of filtered high-current pulsed arc deposition (φ-HCA) with conventional vacuum arc methods

Witke, T., Schuelke, T., Schultrich, B., Siemroth, P. & Vetter, J. Apr 3 2000 In : Surface and Coatings Technology. 126, 1, p. 81-88 8 p.

Research output: Contribution to journal › Article

Hard coatings

high current

arcs

Magnetic filters

Vacuum

19 Citations

Copper metallization in microelectronics using filtered vacuum arc deposition - principles and technological development

Siemroth, P. & Schülke, T. Nov 2000 In : Surface and Coatings Technology. 133-134, p. 106-113 8 p.

Research output: Contribution to journal › Article

Metallizing

microelectronics

Microelectronics

Copper

arcs

1999

30 Citations

Comparison of DC and AC arc thin film deposition techniques

Schuelke, T., Witke, T., Scheibe, H. J., Siemroth, P., Schultrich, B., Zimmer, O. & Vetter, J. Nov 1999 In : Surface and Coatings Technology. 120-121, p. 226-232 7 p.

Research output: Contribution to journal › Article

alternating current

arcs

direct current

Thin films

coatings

19 Citations

Deposition of hard amorphous carbon coatings by laser and arc methods

Witke, T., Schuelke, T., Berthold, J., Meyer, C. F. & Schultrich, B. Sep 1999 In : Surface and Coatings Technology. 116-119, p. 609-613 5 p.

Research output: Contribution to journal › Article

Amorphous carbon

Plasma sources

arcs

Plasmas

coatings

12 Citations

Ion charge state distributions of alloy-cathode vacuum arc plasmas

Schulke, T. 1999 In : IEEE Transactions on Plasma Science. 27, 4, p. 911-914 4 p.

Research output: Contribution to journal › Article

ion charge

plasma jets

cathodes

vacuum

freezing

1 Citations

Ion implantation by vacuum arc plasmas

Schuelke, T. 1999 In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 17, 2, p. 867-870 4 p.

Research output: Contribution to journal › Article

Ion implantation

plasma jets

ion implantation

Vacuum

Plasmas

20 Citations

Velocity distribution of carbon macroparticles generated by pulsed vacuum arcs

Schülke, T. & Anders, A. Nov 1999 In : Plasma Sources Science and Technology. 8, 4, p. 567-571 5 p.

Research output: Contribution to journal › Article

arcs

velocity distribution

vacuum

collisions

carbon

1998

Ion charge state distributions of alloy-cathode vacuum arc plasmas

Schulke, T. & Anders, A. 1998 International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV. Wetzer, J. (ed.). IEEE, Vol. 1, p. 329-332 4 p.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Cathodes

Vacuum

Plasmas

Ions

Freezing

Plasma assisted surface technologies to improve tool properties

Schuelke, T. & Krug, T. 1998 SAE Technical Papers.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nitriding

Plasmas

Physical vapor deposition

Coatings

Nitrogen

1997

Analysis on the metal etch resist selectivity measurement

Premachandran, V., Joy, R., Keung, P. H. K., Lok, L. W., Schülke, T. & Tsai, Y. 1997 Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3213, p. 147-155 9 p.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Photoresists

Selectivity

Resist

Photoresist

Metals

47 Citations

Investigation of cathode spots and plasma formation of vacuum arcs by high speed microscopy and spectroscopy

Siemroth, P., Schülke, T. & Witke, T. 1997 In : IEEE Transactions on Plasma Science. 25, 4, p. 571-579 9 p.

Research output: Contribution to journal › Article

arcs

cathodes

high speed

microscopy

vacuum

46 Citations

Macroparticle filtering of high-current vacuum arc plasmas

Schülke, T., Anders, A. & Siemroth, P. 1997 In : IEEE Transactions on Plasma Science. 25, 4, p. 660-664 5 p.

Research output: Contribution to journal › Article

plasma jets

high current

arcs

vacuum

filters

21 Citations

Metallization of sub-micron trenches and vias with high aspect ratio

Siemroth, P., Wenzel, C., Klimes, W., Schultrich, B. & Schülke, T. Oct 31 1997 In : Thin Solid Films. 308-309, 1-4, p. 455-459 5 p.

Research output: Contribution to journal › Article

Metallizing

high aspect ratio

Aspect ratio

arcs

evaporators

10 Citations

Vacuum arc evaporation with programable erosion and deposition profile

Siemroth, P., Zimmer, O., Schülke, T. & Vetter, J. Oct 1997 In : Surface and Coatings Technology. 94-95, p. 592-596 5 p.

Research output: Contribution to journal › Article

erosion

Erosion

Evaporation

arcs

evaporation

1996

3 Citations

Dynamics of vacuum arc spots at a point cathode

Juettner, B., Djakov, B., Schuelke, T. & Siemroth, P. 1996 International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV. IEEE, Vol. 1, p. 123-127 5 p.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Cathodes

Vacuum

Streak cameras

Luminance

Titanium

2 Citations

Investigation of cathode spots and plasma formation of vacuum arcs by high speed microscopy and spectroscopy

Siemroth, P., Schuelke, T., Witke, T. & Rackwitz, N. 1996 International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV. IEEE, Vol. 1, p. 226-229 4 p.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Fractals

Microscopic examination

Cathodes

Spectroscopy

Vacuum

2 Citations

Macroparticle filtering of high-current vacuum arc plasmas

Schuelke, T., Anders, A. & Siemroth, P. 1996 International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV. IEEE, Vol. 2, p. 914-917 4 p.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Magnetic filters

Cathodes

Vacuum

Plasmas

Ducts

Predicting ion charge state distributions of vacuum arc plasmas

Anders, A. & Schulke, T. 1996 International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV. IEEE, Vol. 1, p. 199-203 5 p.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Cathodes

Vacuum

Plasmas

Ions

Plasma sources

15 Citations

Vacuum arc cathode spots as a self-similarity phenomenon

Schülke, T. & Siemroth, P. 1996 In : IEEE Transactions on Plasma Science. 24, 1, p. 63-64 2 p.

Research output: Contribution to journal › Article

arcs

cathodes

vacuum

micrometers

spatial resolution

1995

14 Citations

Fundamental processes in vacuum arc deposition

Siemroth, P., Schultrich, B. & Schülke, T. 1995 In : Surface and Coatings Technology. 74-75, PART 1, p. 92-96 5 p.

Research output: Contribution to journal › Article

Cathodes

arcs

cathodes

Vacuum

vacuum

32 Citations

Microscopic High Speed Investigations of Vacuum Arc Cathode Spots

Siemroth, P., Schülke, T. & Witke, T. 1995 In : IEEE Transactions on Plasma Science. 23, 6, p. 919-925 7 p.

Research output: Contribution to journal › Article

arcs

cathodes

high speed

vacuum

black body radiation

1994

54 Citations

High-current arc-a new source for high-rate deposition

Siemroth, P., Schülke, T. & Witke, T. 1994 In : Surface and Coatings Technology. 68-69, C, p. 314-319 6 p.

Research output: Contribution to journal › Article

Deposition rates

high current

Evaporation

arcs

Cathodes