Publications 1977 2017

  • 18 h-Index
  • 39 Article
  • 11 Conference contribution
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Article
2017

Extending microwave plasma assisted CVD SCD growth to pressures of 400 Torr

Muehle, M., Asmussen, J., Becker, M. F. & Schuelke, T. Oct 1 2017 In : Diamond and Related Materials. 79, p. 150-163 14 p.

Research output: Research - peer-reviewArticle

diamonds
reactors
vapor deposition
microwaves
Diamond

Quantification of diffuse scattering in glass and polymers by parametric power law analysis of UV to NIR light

Tsu, D. V., Muehle, M., Becker, M., Schuelke, T. & Slagter, J. 2017 (Accepted/In press) In : Surface and Coatings Technology.

Research output: Research - peer-reviewArticle

glass
polymers
scattering
Polymers
Scattering
2016
1 Citations

Fabrication and characterization of boron doped diamond microelectrode arrays of varied geometry

Rusinek, C. A., Becker, M. F., Rechenberg, R. & Schuelke, T. Dec 1 2016 In : Electrochemistry Communications. 73, p. 10-14 5 p.

Research output: Research - peer-reviewArticle

Diamond
Boron
Microelectrodes
Fabrication
Geometry
2015
4 Citations

Fabrication and characterization of a corner architecture Schottky barrier diode structure

Nicley, S., Zajac, S., Rechenberg, R., Becker, M., Hardy, A., Schuelke, T. & Grotjohn, T. A. 2015 (Accepted/In press) In : Physica Status Solidi (A) Applications and Materials Science.

Research output: Research - peer-reviewArticle

Schottky barrier diodes
Diodes
Fabrication
Schottky diodes
diodes
2014
8 Citations

Heavy phosphorus doping by epitaxial growth on the (111) diamond surface

Grotjohn, T. A., Tran, D. T., Yaran, M. K., Demlow, S. N. & Schuelke, T. Apr 2014 In : Diamond and Related Materials. 44, p. 129-133 5 p.

Research output: Research - peer-reviewArticle

Diamond
Epitaxial growth
Phosphorus
Doping (additives)
Diamonds
7 Citations

Substrate crystal recovery for homoepitaxial diamond synthesis

Muehle, M., Becker, M. F., Schuelke, T. & Asmussen, J. 2014 In : Diamond and Related Materials. 42, p. 8-14 7 p.

Research output: Research - peer-reviewArticle

Diamond
Recovery
Crystals
Substrates
Diamonds
2013
30 Citations

Diamond polishing

Schuelke, T. & Grotjohn, T. A. 2013 In : Diamond and Related Materials. 32, p. 17-26 10 p.

Research output: Research - peer-reviewArticle

Diamond
Polishing
Diamonds
polishing
diamonds
31 Citations
diamonds
vapor deposition
microwaves
single crystals
synthesis
8 Citations

Highly sensitive detection of urinary cadmium to assess personal exposure

Argun, A. A., Banks, A. M., Merlen, G., Tempelman, L. A., Becker, M. F., Schuelke, T. & Dweik, B. M. Apr 22 2013 In : Analytica Chimica Acta. 773, p. 45-51 7 p.

Research output: Research - peer-reviewArticle

cadmium
sensor
exposure
detection
Cadmium
2012
24 Citations

Microwave plasma reactor design for high pressure and high power density diamond synthesis

Gu, Y., Lu, J., Grotjohn, T., Schuelke, T. & Asmussen, J. Apr 2012 In : Diamond and Related Materials. 24, p. 210-214 5 p.

Research output: Research - peer-reviewArticle

reactor design
radiant flux density
diamonds
microwaves
synthesis
1 Citations

SiO 2 antireflection layers for single-crystal diamond

Reinhard, D. K., Tran, D. T., Schuelke, T., Becker, M. F., Grotjohn, T. A. & Asmussen, J. May 2012 In : Diamond and Related Materials. 25, p. 84-86 3 p.

Research output: Research - peer-reviewArticle

Diamond
Single crystals
Diamonds
diamonds
single crystals
2010
21 Citations

Biocompatibility and mechanical properties of diamond-like coatings on cobalt-chromium-molybdenum steel and titanium-aluminum-vanadium biomedical alloys

Hinüber, C., Kleemann, C., Friederichs, R. J., Haubold, L., Scheibe, H. J., Schuelke, T., Boehlert, C. & Baumann, M. J. Nov 2010 In : Journal of Biomedical Materials Research - Part A. 95 A, 2, p. 388-400 13 p.

Research output: Research - peer-reviewArticle

Vanadium
Diamond
Molybdenum
Steel
Chromium
4 Citations

The influence of the surface texture of hydrogen-free tetrahedral amorphous carbon films on their wear performance

Haubold, L., Schuelke, T., Becker, M. & Woodrough, G. Feb 2010 In : Diamond and Related Materials. 19, 2-3, p. 225-228 4 p.

Research output: Research - peer-reviewArticle

Carbon films
Amorphous carbon
Amorphous films
Hydrogen
Textures
2009
9 Citations

Deposition of thick boron-doped homoepitaxial single crystal diamond by microwave plasma chemical vapor deposition

Ramamurti, R., Becker, M., Schuelke, T., Grotjohn, T. A., Reinhard, D. K. & Asmussen, J. May 2009 In : Diamond and Related Materials. 18, 5-8, p. 704-706 3 p.

Research output: Research - peer-reviewArticle

doped crystals
boron
diamonds
vapor deposition
microwaves
2008
20 Citations

Boron doped diamond deposited by microwave plasma-assisted CVD at low and high pressures

Ramamurti, R., Becker, M., Schuelke, T., Grotjohn, T., Reinhard, D., Swain, G. & Asmussen, J. Apr 2008 In : Diamond and Related Materials. 17, 4-5, p. 481-485 5 p.

Research output: Research - peer-reviewArticle

diborane
boron
low pressure
diamonds
vapor deposition
23 Citations

Multiple substrate microwave plasma-assisted chemical vapor deposition single crystal diamond synthesis

Asmussen, J., Grotjohn, T. A., Schuelke, T., Becker, M. F., Yaran, M. K., King, D. J., Wicklein, S. & Reinhard, D. K. 2008 In : Applied Physics Letters. 93, 3, 031502

Research output: Research - peer-reviewArticle

diamonds
vapor deposition
microwaves
single crystals
synthesis
18 Citations

Scaling the microwave plasma-assisted chemical vapor diamond deposition process to 150-200 mm substrates

King, D., Yaran, M. K., Schuelke, T., Grotjohn, T. A., Reinhard, D. K. & Asmussen, J. Apr 2008 In : Diamond and Related Materials. 17, 4-5, p. 520-524 5 p.

Research output: Research - peer-reviewArticle

Diamond
Vapors
Microwaves
Plasmas
Substrates
16 Citations

Synthesis of boron-doped homoepitaxial single crystal diamond by microwave plasma chemical vapor deposition

Ramamurti, R., Becker, M., Schuelke, T., Grotjohn, T., Reinhard, D. & Asmussen, J. Jul 2008 In : Diamond and Related Materials. 17, 7-10, p. 1320-1323 4 p.

Research output: Research - peer-reviewArticle

doped crystals
boron
diamonds
vapor deposition
microwaves
2007

Guest Editorial: Special issue on plenary and invited papers from ICOPS 2006

Almussen, J., Grotjohn, T. A. & Schuelke, T. Apr 2007 In : IEEE Transactions on Plasma Science. 35, 2 I, p. 125-126 2 p.

Research output: Research - peer-reviewArticle

2006
26 Citations

Extending the 3ω-method to the MHz range for thermal conductivity measurements of diamond thin films

Ahmed, S., Liske, R., Wunderer, T., Leonhardt, M., Ziervogel, R., Fansler, C., Grotjohn, T., Asmussen, J. & Schuelke, T. Feb 2006 In : Diamond and Related Materials. 15, 2-3, p. 389-393 5 p.

Research output: Research - peer-reviewArticle

Diamond films
Thermal conductivity
Thin films
thermal conductivity
diamonds
2004
18 Citations

Fabrication and properties of ultranano, nano, and microcrystalline diamond membranes and sheets

Reinhard, D. K., Grotjohn, T. A., Becker, M., Yaran, M. K., Schuelke, T. & Asmussen, J. Nov 2004 In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22, 6, p. 2811-2817 7 p.

Research output: Research - peer-reviewArticle

Diamonds
Membranes
Fabrication
diamonds
membranes
2002
39 Citations

Quality control of ultra-thin and super-hard coatings by laser-acoustics

Schneider, D., Siemroth, P., Schülke, T., Berthold, J., Schultrich, B., Schneider, H. H., Ohr, R., Petereit, B. & Hillgers, H. Apr 15 2002 In : Surface and Coatings Technology. 153, 2-3, p. 252-260 9 p.

Research output: Research - peer-reviewArticle

Hard coatings
Quality control
Acoustics
Lasers
quality control
2000
33 Citations

Comparison of filtered high-current pulsed arc deposition (φ-HCA) with conventional vacuum arc methods

Witke, T., Schuelke, T., Schultrich, B., Siemroth, P. & Vetter, J. Apr 3 2000 In : Surface and Coatings Technology. 126, 1, p. 81-88 8 p.

Research output: Research - peer-reviewArticle

Hard coatings
Vacuum
high current
arcs
vacuum
19 Citations
microelectronics
arcs
copper
vacuum
Metallizing
1999
29 Citations

Comparison of DC and AC arc thin film deposition techniques

Schuelke, T., Witke, T., Scheibe, H. J., Siemroth, P., Schultrich, B., Zimmer, O. & Vetter, J. Nov 1999 In : Surface and Coatings Technology. 120-121, p. 226-232 7 p.

Research output: Research - peer-reviewArticle

alternating current
arcs
direct current
thin films
Thin films
16 Citations

Deposition of hard amorphous carbon coatings by laser and arc methods

Witke, T., Schuelke, T., Berthold, J., Meyer, C. F. & Schultrich, B. Sep 1999 In : Surface and Coatings Technology. 116-119, p. 609-613 5 p.

Research output: Research - peer-reviewArticle

Amorphous carbon
Plasmas
Coatings
Lasers
arcs
12 Citations

Ion charge state distributions of alloy-cathode vacuum arc plasmas

Schulke, T. 1999 In : IEEE Transactions on Plasma Science. 27, 4, p. 911-914 4 p.

Research output: Research - peer-reviewArticle

ion charge
plasma jets
cathodes
vacuum
freezing
1 Citations
plasma jets
ion implantation
vacuum
Ion implantation
Vacuum
18 Citations

Velocity distribution of carbon macroparticles generated by pulsed vacuum arcs

Schülke, T. & Anders, A. Nov 1999 In : Plasma Sources Science and Technology. 8, 4, p. 567-571 5 p.

Research output: Research - peer-reviewArticle

arcs
velocity distribution
vacuum
collisions
carbon
1997
46 Citations

Investigation of cathode spots and plasma formation of vacuum arcs by high speed microscopy and spectroscopy

Siemroth, P., Schülke, T. & Witke, T. 1997 In : IEEE Transactions on Plasma Science. 25, 4, p. 571-579 9 p.

Research output: Research - peer-reviewArticle

arcs
cathodes
high speed
microscopy
vacuum
44 Citations

Macroparticle filtering of high-current vacuum arc plasmas

Schülke, T., Anders, A. & Siemroth, P. 1997 In : IEEE Transactions on Plasma Science. 25, 4, p. 660-664 5 p.

Research output: Research - peer-reviewArticle

plasma jets
high current
vacuum
arcs
filters
21 Citations

Metallization of sub-micron trenches and vias with high aspect ratio

Siemroth, P., Wenzel, C., Klimes, W., Schultrich, B. & Schülke, T. Oct 31 1997 In : Thin Solid Films. 308-309, 1-4, p. 455-459 5 p.

Research output: Research - peer-reviewArticle

high aspect ratio
arcs
Metallizing
Aspect ratio
evaporators
10 Citations

Vacuum arc evaporation with programable erosion and deposition profile

Siemroth, P., Zimmer, O., Schülke, T. & Vetter, J. Oct 1997 In : Surface and Coatings Technology. 94-95, p. 592-596 5 p.

Research output: Research - peer-reviewArticle

erosion
arcs
evaporation
vacuum
profiles
1996
15 Citations

Vacuum arc cathode spots as a self-similarity phenomenon

Schülke, T. & Siemroth, P. 1996 In : IEEE Transactions on Plasma Science. 24, 1, p. 63-64 2 p.

Research output: Research - peer-reviewArticle

arcs
cathodes
vacuum
micrometers
spatial resolution
1995
14 Citations

Fundamental processes in vacuum arc deposition

Siemroth, P., Schultrich, B. & Schülke, T. 1995 In : Surface and Coatings Technology. 74-75, PART 1, p. 92-96 5 p.

Research output: Research - peer-reviewArticle

arcs
cathodes
vacuum
Cathodes
Vacuum
32 Citations

Microscopic High Speed Investigations of Vacuum Arc Cathode Spots

Siemroth, P., Schülke, T. & Witke, T. 1995 In : IEEE Transactions on Plasma Science. 23, 6, p. 919-925 7 p.

Research output: Research - peer-reviewArticle

arcs
cathodes
high speed
vacuum
copper
1994
53 Citations

High-current arc-a new source for high-rate deposition

Siemroth, P., Schülke, T. & Witke, T. 1994 In : Surface and Coatings Technology. 68-69, C, p. 314-319 6 p.

Research output: Research - peer-reviewArticle

Deposition rates
Evaporation
high current
arcs
Cathodes
4 Citations

Short-time investigation of laser and arc-assisted deposition processes

Siemroth, P., Witke, T., Schülke, T. & Lenk, A. 1994 In : Surface and Coatings Technology. 68-69, C, p. 713-718 6 p.

Research output: Research - peer-reviewArticle

pulsed laser deposition
arcs
lasers
Pulsed laser deposition
Lasers
1977
6 Citations

Gap filling with PVD processes for copper metallized integrated circuits

Wenzel, C., Urbansky, N., Klimes, W., Siemroth, P. & Schülke, T. 1977 In : Microelectronic Engineering. 33, 1-4, p. 31-38 8 p.

Research output: Research - peer-reviewArticle

Physical vapor deposition
Integrated circuits
Copper
integrated circuits
copper