A versatile approach to selective and inexpensive copper patterns using polyelectrolyte multilayer coatings

Troy R. Hendricks, Ilsoon Lee

    Research output: Research - peer-reviewArticle

    • 21 Citations

    Abstract

    Versatile, highly selective, and inexpensive metal patterning techniques on various substrates are demanded for current research in microelectronic device fabrications. We present a new process for creating highly selective and cost-effective copper patterns that can be plated on virtually any substrate including plastics by combining polyelectrolyte multilayer (PEM) coatings, microcontact printing, and electroless deposition. Optical microscope, atomic force microscopy and energy dispersive X-ray spectroscopy were used to show the resulting copper structures exclusively plated where the patterned catalyst was electrostatically bound to the PEM coated surfaces. The copper plating rate was measured using a quartz crystal microbalance. The unpatterned polyelectrolyte surfaces are still active and can be used with additional processing to create complicated three dimensional metal architectures or even bimetallic patterns.

    LanguageEnglish (US)
    Pages2347-2352
    Number of pages6
    JournalThin Solid Films
    Volume515
    Issue number4
    DOIs
    StatePublished - Dec 5 2006

    Profile

    Polyelectrolytes
    Copper
    Multilayers
    Coatings
    coatings
    copper
    Metals
    Substrates
    metals
    Copper plating
    Electroless plating
    Quartz crystal microbalances
    Microelectronics
    Printing
    Atomic force microscopy
    Microscopes
    Plastics
    Fabrication
    Catalysts
    Processing

    Keywords

    • Metallization
    • Microcontact printing
    • Multilayers
    • Polyelectrolyte

    ASJC Scopus subject areas

    • Surfaces, Coatings and Films
    • Condensed Matter Physics
    • Surfaces and Interfaces

    Cite this

    A versatile approach to selective and inexpensive copper patterns using polyelectrolyte multilayer coatings. / Hendricks, Troy R.; Lee, Ilsoon.

    In: Thin Solid Films, Vol. 515, No. 4, 05.12.2006, p. 2347-2352.

    Research output: Research - peer-reviewArticle

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