Fabrication and characterization of a corner architecture Schottky barrier diode structure

Shannon Nicley, Stephen Zajac, Robert Rechenberg, Michael Becker, Aaron Hardy, Thomas Schuelke, Timothy A. Grotjohn

Research output: Research - peer-reviewArticle

  • 4 Citations

Abstract

The corner architecture Schottky barrier diode (SBD) structure is proposed as an alternative vertical architecture for the realization of high power, high temperature, single crystal diamond diodes. The lightly doped layer of the diode is grown in a direction perpendicular to the previous epitaxial growth of the heavily doped layer, to reduce the threading-type dislocations in the active region of the fabricated diodes. The first ever corner architecture SBD is fabricated and evaluated for diode performance. The fabrication steps are described, including homoepitaxial diamond films deposited at high and low doping levels. Depositions are performed in microwave plasma-assisted chemical vapor deposition (MPACVD) plasma disc bell-jar reactors, with feedgas mixtures including hydrogen, methane, and diborane. Schematic diagram of the corner architecture Schottky barrier diode.

LanguageEnglish (US)
JournalPhysica Status Solidi (A) Applications and Materials Science
DOIs
StateAccepted/In press - 2015

Profile

Schottky barrier diodes
Diodes
Fabrication
Schottky diodes
diodes
fabrication
Plasmas
Diamond
Diamond films
Methane
Schematic diagrams
Epitaxial growth
Hydrogen
Chemical vapor deposition
Microwaves
Doping (additives)
Single crystals
Temperature
Direction compound
diborane

Keywords

  • Boron doping
  • CVD
  • Diamond
  • Schottky barrier diodes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

Fabrication and characterization of a corner architecture Schottky barrier diode structure. / Nicley, Shannon; Zajac, Stephen; Rechenberg, Robert; Becker, Michael; Hardy, Aaron; Schuelke, Thomas; Grotjohn, Timothy A.

In: Physica Status Solidi (A) Applications and Materials Science, 2015.

Research output: Research - peer-reviewArticle

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AU - Hardy,Aaron

AU - Schuelke,Thomas

AU - Grotjohn,Timothy A.

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