Post-CMOS compatible microfabrication of a multi-analyte bioelectrochemical sensor array microsystem

Yue Huang, Andrew Mason, Aaron J. Greiner, Robert Y. Ofoli, R. Mark Worden

    Research output: ResearchConference contribution

    • 7 Citations

    Abstract

    A multi-analyte electrochemical sensor array platform has been developed for protein-based biosensors utilizing post-CMOS compatible fabrication procedures that enables formation of single-chip biosensor array microsystems. The process was developed on a glass substrate to emulate the surface of a CMOS chip. A three-electrode system, including an array of gold working electrodes (WE) and an on-chip Ag/AgCl reference electrode (RE), was formed to facilitate electrochemical analysis protein-based interfaces. SU-8 epoxy resin was subsequently applied and patterned as an insulation and planerization layer before application of microfluidic channels used to self-assemble novel bio-interfaces on individual working electrodes. The protein-based biointerfaces provide selectivity, and the electrode floorplan maximizes sensitivity and minimizes solution resistance errors. The electrodes on the prototype platform can be easily scaled to form ∼100 electrodes on the surface of a 10mm 2 CMOS chip.

    LanguageEnglish (US)
    Title of host publicationProceedings of IEEE Sensors
    Pages612-615
    Number of pages4
    DOIs
    StatePublished - 2006
    Event2006 5th IEEE Conference on Sensors - Daegu, Korea, Republic of
    Duration: Oct 22 2006Oct 25 2006

    Other

    Other2006 5th IEEE Conference on Sensors
    CountryKorea, Republic of
    CityDaegu
    Period10/22/0610/25/06

    Profile

    Microfabrication
    Microsystems
    Sensor arrays
    Electrodes
    Proteins
    Biosensors
    Electrochemical sensors
    Microfluidics
    Epoxy resins
    Insulation
    Gold
    Fabrication
    Glass
    Substrates

    ASJC Scopus subject areas

    • Engineering (miscellaneous)
    • Electrical and Electronic Engineering

    Cite this

    Post-CMOS compatible microfabrication of a multi-analyte bioelectrochemical sensor array microsystem. / Huang, Yue; Mason, Andrew; Greiner, Aaron J.; Ofoli, Robert Y.; Mark Worden, R.

    Proceedings of IEEE Sensors. 2006. p. 612-615 4178694.

    Research output: ResearchConference contribution

    Huang, Y, Mason, A, Greiner, AJ, Ofoli, RY & Mark Worden, R 2006, Post-CMOS compatible microfabrication of a multi-analyte bioelectrochemical sensor array microsystem. in Proceedings of IEEE Sensors., 4178694, pp. 612-615, 2006 5th IEEE Conference on Sensors, Daegu, Korea, Republic of, 10/22/06. DOI: 10.1109/ICSENS.2007.355542
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