Post-CMOS compatible microfabrication of a multi-analyte bioelectrochemical sensor array microsystem

Yue Huang, Andrew Mason, Aaron J. Greiner, Robert Y. Ofoli, R. Mark Worden

Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • 7 Citations

Abstract

A multi-analyte electrochemical sensor array platform has been developed for protein-based biosensors utilizing post-CMOS compatible fabrication procedures that enables formation of single-chip biosensor array microsystems. The process was developed on a glass substrate to emulate the surface of a CMOS chip. A three-electrode system, including an array of gold working electrodes (WE) and an on-chip Ag/AgCl reference electrode (RE), was formed to facilitate electrochemical analysis protein-based interfaces. SU-8 epoxy resin was subsequently applied and patterned as an insulation and planerization layer before application of microfluidic channels used to self-assemble novel bio-interfaces on individual working electrodes. The protein-based biointerfaces provide selectivity, and the electrode floorplan maximizes sensitivity and minimizes solution resistance errors. The electrodes on the prototype platform can be easily scaled to form ∼100 electrodes on the surface of a 10mm 2 CMOS chip.

LanguageEnglish (US)
Title of host publicationProceedings of IEEE Sensors
Pages612-615
Number of pages4
DOIs
StatePublished - 2006
Event2006 5th IEEE Conference on Sensors - Daegu, Korea, Republic of
Duration: Oct 22 2006Oct 25 2006

Other

Other2006 5th IEEE Conference on Sensors
CountryKorea, Republic of
CityDaegu
Period10/22/0610/25/06

Profile

Microfabrication
Microsystems
Sensor arrays
Electrodes
Proteins
Biosensors
Electrochemical sensors
Microfluidics
Epoxy resins
Insulation
Gold
Fabrication
Glass
Substrates

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

Cite this

Post-CMOS compatible microfabrication of a multi-analyte bioelectrochemical sensor array microsystem. / Huang, Yue; Mason, Andrew; Greiner, Aaron J.; Ofoli, Robert Y.; Mark Worden, R.

Proceedings of IEEE Sensors. 2006. p. 612-615 4178694.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Huang, Y, Mason, A, Greiner, AJ, Ofoli, RY & Mark Worden, R 2006, Post-CMOS compatible microfabrication of a multi-analyte bioelectrochemical sensor array microsystem. in Proceedings of IEEE Sensors., 4178694, pp. 612-615, 2006 5th IEEE Conference on Sensors, Daegu, Korea, Republic of, 10/22/06. DOI: 10.1109/ICSENS.2007.355542
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