Properties of lithium phosphorus oxynitride (Lipon) for 3D solid-state lithium batteries

Fan Xu, Nancy J. Dudney, Gabriel M. Veith, Yoongu Kim, Can Erdonmez, Wei Lai, Yet Ming Chiang

Research output: Research - peer-reviewArticle

  • 22 Citations

Abstract

The thin film electrolyte known as Lipon (lithium phosphorous oxynitride) has proven successful for planar thin film battery applications. Here, the sputter deposition of the amorphous LiPON electrolyte onto more complex 3D structures is examined. The 3D structures include off-axis alignment of planar substrates and also 10-100 μ arrays of pores, columns, and grooves. For magnetron sputtering in N2 gas at 2.6 Pa, the Lipon film deposition is not restricted to be line-of-sight to the target, but forms conformal and dense films over the 3D and off-axis substrates. The deposition rate decreases for areas and grooves that are less accessible by the sputtered flux. The composition varies, but remains within the range that gives sufficient Li + ionic conductivity, 2 ± 1 μS/cm.

LanguageEnglish (US)
Pages1507-1515
Number of pages9
JournalJournal of Materials Research
Volume25
Issue number8
DOIs
StatePublished - Aug 2010
Externally publishedYes

Profile

Lithium batteries
Lithium
Phosphorus
Electrolytes
Thin films
Substrates
lithium batteries
oxynitrides
phosphorus
lithium
solid state
grooves
electrolytes
thin films
Sputter deposition
Ionic conductivity
Deposition rates
Magnetron sputtering
Gases
Fluxes

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanical Engineering
  • Mechanics of Materials
  • Condensed Matter Physics

Cite this

Xu, F., Dudney, N. J., Veith, G. M., Kim, Y., Erdonmez, C., Lai, W., & Chiang, Y. M. (2010). Properties of lithium phosphorus oxynitride (Lipon) for 3D solid-state lithium batteries. Journal of Materials Research, 25(8), 1507-1515. DOI: 10.1557/jmr.2010.0193

Properties of lithium phosphorus oxynitride (Lipon) for 3D solid-state lithium batteries. / Xu, Fan; Dudney, Nancy J.; Veith, Gabriel M.; Kim, Yoongu; Erdonmez, Can; Lai, Wei; Chiang, Yet Ming.

In: Journal of Materials Research, Vol. 25, No. 8, 08.2010, p. 1507-1515.

Research output: Research - peer-reviewArticle

Xu, F, Dudney, NJ, Veith, GM, Kim, Y, Erdonmez, C, Lai, W & Chiang, YM 2010, 'Properties of lithium phosphorus oxynitride (Lipon) for 3D solid-state lithium batteries' Journal of Materials Research, vol 25, no. 8, pp. 1507-1515. DOI: 10.1557/jmr.2010.0193
Xu F, Dudney NJ, Veith GM, Kim Y, Erdonmez C, Lai W et al. Properties of lithium phosphorus oxynitride (Lipon) for 3D solid-state lithium batteries. Journal of Materials Research. 2010 Aug;25(8):1507-1515. Available from, DOI: 10.1557/jmr.2010.0193
Xu, Fan ; Dudney, Nancy J. ; Veith, Gabriel M. ; Kim, Yoongu ; Erdonmez, Can ; Lai, Wei ; Chiang, Yet Ming. / Properties of lithium phosphorus oxynitride (Lipon) for 3D solid-state lithium batteries. In: Journal of Materials Research. 2010 ; Vol. 25, No. 8. pp. 1507-1515
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