Sub-micron resolution selected area electron channeling patterns

J. Guyon, H. Mansour, N. Gey, M. A. Crimp, S. Chalal, N. Maloufi

    Research output: Research - peer-reviewArticle

    • 7 Citations

    Abstract

    Collection of selected area channeling patterns (SACPs) on a high resolution FEG-SEM is essential to carry out quantitative electron channeling contrast imaging (ECCI) studies, as it facilitates accurate determination of the crystal plane normal with respect to the incident beam direction and thus allows control the electron channeling conditions. Unfortunately commercial SACP modes developed in the past were limited in spatial resolution and are often no longer offered. In this contribution we present a novel approach for collecting high resolution SACPs (HR-SACPs) developed on a Gemini column. This HR-SACP technique combines the first demonstrated sub-micron spatial resolution with high angular accuracy of about 0.1°, at a convenient working distance of 10. mm. This innovative approach integrates the use of aperture alignment coils to rock the beam with a digitally calibrated beam shift procedure to ensure the rocking beam is maintained on a point of interest. Moreover a new methodology to accurately measure SACP spatial resolution is proposed. While column considerations limit the rocking angle to 4°, this range is adequate to index the HR-SACP in conjunction with the pattern simulated from the approximate orientation deduced by EBSD. This new technique facilitates Accurate ECCI (A-ECCI) studies from very fine grained and/or highly strained materials. It offers also new insights for developing HR-SACP modes on new generation high-resolution electron columns.

    LanguageEnglish (US)
    Pages34-44
    Number of pages11
    JournalUltramicroscopy
    Volume149
    DOIs
    StatePublished - Feb 1 2015

    Profile

    high resolution
    electrons
    Electrons
    spatial resolution
    Imaging techniques
    Rocks
    Crystals
    Scanning electron microscopy
    Direction compound
    coils
    apertures
    alignment
    rocks
    methodology
    scanning electron microscopy
    shift
    crystals

    Keywords

    • EBSD
    • ECCI
    • FEG-SEM
    • Gemini column
    • Rocking beam
    • SACP

    ASJC Scopus subject areas

    • Atomic and Molecular Physics, and Optics
    • Instrumentation
    • Electronic, Optical and Magnetic Materials

    Cite this

    Guyon, J., Mansour, H., Gey, N., Crimp, M. A., Chalal, S., & Maloufi, N. (2015). Sub-micron resolution selected area electron channeling patterns. Ultramicroscopy, 149, 34-44. DOI: 10.1016/j.ultramic.2014.11.004

    Sub-micron resolution selected area electron channeling patterns. / Guyon, J.; Mansour, H.; Gey, N.; Crimp, M. A.; Chalal, S.; Maloufi, N.

    In: Ultramicroscopy, Vol. 149, 01.02.2015, p. 34-44.

    Research output: Research - peer-reviewArticle

    Guyon, J, Mansour, H, Gey, N, Crimp, MA, Chalal, S & Maloufi, N 2015, 'Sub-micron resolution selected area electron channeling patterns' Ultramicroscopy, vol 149, pp. 34-44. DOI: 10.1016/j.ultramic.2014.11.004
    Guyon J, Mansour H, Gey N, Crimp MA, Chalal S, Maloufi N. Sub-micron resolution selected area electron channeling patterns. Ultramicroscopy. 2015 Feb 1;149:34-44. Available from, DOI: 10.1016/j.ultramic.2014.11.004
    Guyon, J. ; Mansour, H. ; Gey, N. ; Crimp, M. A. ; Chalal, S. ; Maloufi, N./ Sub-micron resolution selected area electron channeling patterns. In: Ultramicroscopy. 2015 ; Vol. 149. pp. 34-44
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